| # | Term | Stands For |
|---|---|---|
| 1 | C-SAM | Confocal Scanning Acoustic Microscopy |
| 2 | CAPA | Corrective And Preventive Action |
| 3 | CapEx | Capital Expenditures |
| 4 | CD | Critical Dimension |
| 5 | CLSM | Confocal Laser Scanning Microscopy |
| 6 | CMM | Coordinate Measuring Machine |
| 7 | COP | Cyclo Olefin Polymer |
| 8 | Cp | Process Capability |
| 9 | CPD | Cycles Per Degree |
| 10 | Cpk | Process Capability Index |
| 11 | CR | Contrast Ratio |
| 12 | CRA | Chief Ray Angle |
| 13 | CTB | Clear To Build |
| 14 | CTE | Coefficient Of Thermal Expansion |
| 15 | CVD | Chemical Vapor Deposition |